一、基(ji)礎知識。
1.氣體(ti)知識氮氣作為(wei)空(kong)氣中最豐富的(de)氣體(ti)，取之(zhi)不(bu)(bu)盡(jin)，用(yong)之(zhi)不(bu)(bu)竭。它無(wu)色、無(wu)味、透(tou)明，屬于亞惰性氣體(ti)，不(bu)(bu)維持生命(ming)。在隔(ge)絕氧氣或(huo)空(kong)氣的(de)地方(fang)，高純度氮氣經(jing)常(chang)被(bei)用(yong)作保護氣體(ti)。空(kong)氣中氮(N2)的(de)含量為(wei)78.084%(空(kong)氣中各種氣體(ti)的(de)體(ti)積組成為(wei):N2: 78.084%，O2: 20.9476%，氬:0.9364%，CO2: 0.0314%，其他為(wei)H2、CH4、N2O、O3、SO2、NO2等。，但(dan)是(shi)。2.壓(ya)(ya)力(li)知識變(bian)壓(ya)(ya)吸(xi)附制氮工藝(yi)是(shi)壓(ya)(ya)力(li)吸(xi)附和常(chang)壓(ya)(ya)解吸(xi)，因此必須使用(yong)壓(ya)(ya)縮空(kong)氣。碳(tan)分子(zi)篩的(de)最佳吸(xi)附壓(ya)(ya)力(li)為(wei)0.75~0.9MPa，整個制氮系統中的(de)氣體(ti)處于壓(ya)(ya)力(li)下，具有沖擊能量。
二.變(bian)壓(ya)(ya)吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)制(zhi)氮(dan)(dan)(dan)工作原(yuan)理(li):變(bian)壓(ya)(ya)吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)制(zhi)氮(dan)(dan)(dan)機是(shi)以(yi)碳(tan)(tan)分(fen)(fen)(fen)(fen)子(zi)(zi)篩(shai)為(wei)吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)劑(ji)，利用(yong)(yong)壓(ya)(ya)力吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)和(he)(he)(he)減(jian)壓(ya)(ya)解(jie)吸(xi)(xi)(xi)(xi)(xi)原(yuan)理(li)，從空(kong)(kong)氣(qi)(qi)中(zhong)(zhong)吸(xi)(xi)(xi)(xi)(xi)收(shou)和(he)(he)(he)釋放氧(yang)氣(qi)(qi)，從而分(fen)(fen)(fen)(fen)離氮(dan)(dan)(dan)氣(qi)(qi)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)自動(dong)(dong)化設備。碳(tan)(tan)分(fen)(fen)(fen)(fen)子(zi)(zi)篩(shai)是(shi)以(yi)煤為(wei)主要原(yuan)料，經研(yan)磨、氧(yang)化、成型(xing)、炭化而成的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)一種表(biao)面和(he)(he)(he)內部均有微(wei)孔(kong)(kong)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)圓柱形(xing)顆粒狀吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)劑(ji)。其孔(kong)(kong)徑(jing)(jing)(jing)分(fen)(fen)(fen)(fen)布如下(xia)圖所示(shi):碳(tan)(tan)分(fen)(fen)(fen)(fen)子(zi)(zi)篩(shai)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)孔(kong)(kong)徑(jing)(jing)(jing)分(fen)(fen)(fen)(fen)布特性使其能(neng)夠實現O2和(he)(he)(he)N2的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)動(dong)(dong)態分(fen)(fen)(fen)(fen)離。這樣(yang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)孔(kong)(kong)徑(jing)(jing)(jing)分(fen)(fen)(fen)(fen)布可(ke)(ke)以(yi)使不同的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)氣(qi)(qi)體(ti)以(yi)不同的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)速率(lv)擴散(san)到分(fen)(fen)(fen)(fen)子(zi)(zi)篩(shai)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)微(wei)孔(kong)(kong)中(zhong)(zhong)，而不排斥(chi)混(hun)合氣(qi)(qi)體(ti)(空(kong)(kong)氣(qi)(qi))中(zhong)(zhong)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)任(ren)何氣(qi)(qi)體(ti)。碳(tan)(tan)分(fen)(fen)(fen)(fen)子(zi)(zi)篩(shai)對O2和(he)(he)(he)N2的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)分(fen)(fen)(fen)(fen)離作用(yong)(yong)是(shi)基于(yu)這兩(liang)種氣(qi)(qi)體(ti)動(dong)(dong)力學直(zhi)徑(jing)(jing)(jing)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)微(wei)小差異。O2分(fen)(fen)(fen)(fen)子(zi)(zi)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)動(dong)(dong)力學直(zhi)徑(jing)(jing)(jing)較(jiao)小，因(yin)此(ci)在(zai)碳(tan)(tan)分(fen)(fen)(fen)(fen)子(zi)(zi)篩(shai)微(wei)孔(kong)(kong)中(zhong)(zhong)擴散(san)速度較(jiao)快，而N2分(fen)(fen)(fen)(fen)子(zi)(zi)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)動(dong)(dong)力學直(zhi)徑(jing)(jing)(jing)較(jiao)大，因(yin)此(ci)擴散(san)速度較(jiao)慢。水和(he)(he)(he)CO2在(zai)壓(ya)(ya)縮空(kong)(kong)氣(qi)(qi)中(zhong)(zhong)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)擴散(san)與氧(yang)氣(qi)(qi)相似，而氬氣(qi)(qi)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)擴散(san)較(jiao)慢。N2和(he)(he)(he)氬的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)氣(qi)(qi)體(ti)混(hun)合物最終從吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)塔中(zhong)(zhong)富集(ji)。碳(tan)(tan)分(fen)(fen)(fen)(fen)子(zi)(zi)篩(shai)在(zai)O2和(he)(he)(he)N2上(shang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)特性可(ke)(ke)以(yi)用(yong)(yong)平衡吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)曲線和(he)(he)(he)動(dong)(dong)態吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)曲線直(zhi)觀(guan)地表(biao)示(shi)。從這兩(liang)條吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)曲線可(ke)(ke)以(yi)看出，吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)壓(ya)(ya)力的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)增(zeng)加(jia)可(ke)(ke)以(yi)同時增(zeng)加(jia)O2和(he)(he)(he)N2的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)量，O2的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)量會增(zeng)加(jia)更多。變(bian)壓(ya)(ya)吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)周期短(duan)，O2和(he)(he)(he)N2的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)量遠未(wei)達到平衡(最大值)，因(yin)此(ci)O2和(he)(he)(he)N2擴散(san)速率(lv)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)差異使得(de)O2的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)量在(zai)短(duan)時間內大大超過N2。變(bian)壓(ya)(ya)吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)制(zhi)氮(dan)(dan)(dan)利用(yong)(yong)碳(tan)(tan)分(fen)(fen)(fen)(fen)子(zi)(zi)篩(shai)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)選(xuan)擇性吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)特性，采用(yong)(yong)加(jia)壓(ya)(ya)吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)和(he)(he)(he)減(jian)壓(ya)(ya)解(jie)吸(xi)(xi)(xi)(xi)(xi)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)循環，使壓(ya)(ya)縮空(kong)(kong)氣(qi)(qi)交替進入(ru)吸(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)塔(也可(ke)(ke)單塔完成)實現空(kong)(kong)氣(qi)(qi)分(fen)(fen)(fen)(fen)離，從而連續(xu)生產(chan)高純度的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)產(chan)品氮(dan)(dan)(dan)。
三(san)(san).變(bian)壓(ya)(ya)(ya)(ya)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)(fu)(fu)制氮(dan)(dan)基本工藝流(liu)(liu)程(cheng)(cheng)(cheng)(cheng):變(bian)壓(ya)(ya)(ya)(ya)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)(fu)(fu)制氮(dan)(dan)機示意圖基本工藝流(liu)(liu)程(cheng)(cheng)(cheng)(cheng)空(kong)(kong)氣(qi)經空(kong)(kong)氣(qi)壓(ya)(ya)(ya)(ya)縮(suo)機壓(ya)(ya)(ya)(ya)縮(suo)、除塵、脫脂(zhi)、干燥后(hou)(hou)進(jin)(jin)入(ru)儲氣(qi)罐(guan)，通(tong)(tong)(tong)(tong)(tong)過(guo)(guo)(guo)(guo)進(jin)(jin)氣(qi)閥(fa)(fa)(fa)(fa)(fa)(fa)和左(zuo)(zuo)(zuo)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)氣(qi)閥(fa)(fa)(fa)(fa)(fa)(fa)進(jin)(jin)入(ru)左(zuo)(zuo)(zuo)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)(fu)(fu)塔(ta)(ta)。塔(ta)(ta)壓(ya)(ya)(ya)(ya)上(shang)升，壓(ya)(ya)(ya)(ya)縮(suo)空(kong)(kong)氣(qi)中(zhong)(zhong)(zhong)的(de)(de)(de)(de)(de)氧(yang)分子(zi)被碳分子(zi)篩(shai)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)(fu)(fu)。未(wei)被吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)(fu)(fu)的(de)(de)(de)(de)(de)氮(dan)(dan)氣(qi)通(tong)(tong)(tong)(tong)(tong)過(guo)(guo)(guo)(guo)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)(fu)(fu)床，通(tong)(tong)(tong)(tong)(tong)過(guo)(guo)(guo)(guo)左(zuo)(zuo)(zuo)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)入(ru)閥(fa)(fa)(fa)(fa)(fa)(fa)和制氮(dan)(dan)閥(fa)(fa)(fa)(fa)(fa)(fa)進(jin)(jin)入(ru)儲氮(dan)(dan)罐(guan)。這(zhe)個過(guo)(guo)(guo)(guo)程(cheng)(cheng)(cheng)(cheng)叫(jiao)做(zuo)左(zuo)(zuo)(zuo)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)，持(chi)(chi)續時(shi)(shi)間是幾個。左(zuo)(zuo)(zuo)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)過(guo)(guo)(guo)(guo)程(cheng)(cheng)(cheng)(cheng)結束后(hou)(hou)，左(zuo)(zuo)(zuo)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)(fu)(fu)塔(ta)(ta)和右(you)(you)(you)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)(fu)(fu)塔(ta)(ta)通(tong)(tong)(tong)(tong)(tong)過(guo)(guo)(guo)(guo)上(shang)下均(jun)壓(ya)(ya)(ya)(ya)閥(fa)(fa)(fa)(fa)(fa)(fa)連(lian)通(tong)(tong)(tong)(tong)(tong)，使(shi)兩(liang)塔(ta)(ta)壓(ya)(ya)(ya)(ya)力均(jun)衡(heng)。這(zhe)個過(guo)(guo)(guo)(guo)程(cheng)(cheng)(cheng)(cheng)叫(jiao)做(zuo)壓(ya)(ya)(ya)(ya)力均(jun)衡(heng)，持(chi)(chi)續2~3秒(miao)。壓(ya)(ya)(ya)(ya)力均(jun)衡(heng)后(hou)(hou)，壓(ya)(ya)(ya)(ya)縮(suo)空(kong)(kong)氣(qi)通(tong)(tong)(tong)(tong)(tong)過(guo)(guo)(guo)(guo)進(jin)(jin)氣(qi)閥(fa)(fa)(fa)(fa)(fa)(fa)和右(you)(you)(you)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)氣(qi)閥(fa)(fa)(fa)(fa)(fa)(fa)進(jin)(jin)入(ru)右(you)(you)(you)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)(fu)(fu)塔(ta)(ta)，壓(ya)(ya)(ya)(ya)縮(suo)空(kong)(kong)氣(qi)中(zhong)(zhong)(zhong)的(de)(de)(de)(de)(de)氧(yang)分子(zi)被碳分子(zi)篩(shai)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)(fu)(fu)，富集的(de)(de)(de)(de)(de)氮(dan)(dan)氣(qi)通(tong)(tong)(tong)(tong)(tong)過(guo)(guo)(guo)(guo)右(you)(you)(you)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)氣(qi)閥(fa)(fa)(fa)(fa)(fa)(fa)和制氮(dan)(dan)閥(fa)(fa)(fa)(fa)(fa)(fa)進(jin)(jin)入(ru)氮(dan)(dan)氣(qi)儲罐(guan)。這(zhe)個過(guo)(guo)(guo)(guo)程(cheng)(cheng)(cheng)(cheng)叫(jiao)做(zuo)右(you)(you)(you)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)，持(chi)(chi)續幾十秒(miao)。同(tong)時(shi)(shi)，左(zuo)(zuo)(zuo)側吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)(fu)(fu)塔(ta)(ta)中(zhong)(zhong)(zhong)的(de)(de)(de)(de)(de)碳分子(zi)篩(shai)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)(fu)(fu)的(de)(de)(de)(de)(de)氧(yang)氣(qi)通(tong)(tong)(tong)(tong)(tong)過(guo)(guo)(guo)(guo)左(zuo)(zuo)(zuo)側排(pai)氣(qi)閥(fa)(fa)(fa)(fa)(fa)(fa)減壓(ya)(ya)(ya)(ya)釋放回大氣(qi)中(zhong)(zhong)(zhong)，稱(cheng)為(wei)脫附(fu)(fu)(fu)(fu)(fu)。相反(fan)(fan)，當左(zuo)(zuo)(zuo)塔(ta)(ta)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)(fu)(fu)時(shi)(shi)，右(you)(you)(you)塔(ta)(ta)同(tong)時(shi)(shi)解吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)。為(wei)了將分子(zi)篩(shai)降壓(ya)(ya)(ya)(ya)釋放的(de)(de)(de)(de)(de)氧(yang)氣(qi)排(pai)入(ru)大氣(qi)，氮(dan)(dan)氣(qi)通(tong)(tong)(tong)(tong)(tong)過(guo)(guo)(guo)(guo)常開(kai)(kai)反(fan)(fan)洗閥(fa)(fa)(fa)(fa)(fa)(fa)吹脫吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)(fu)(fu)塔(ta)(ta)，將塔(ta)(ta)內氧(yang)氣(qi)吹出吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)(fu)(fu)塔(ta)(ta)。這(zhe)一過(guo)(guo)(guo)(guo)程(cheng)(cheng)(cheng)(cheng)稱(cheng)為(wei)反(fan)(fan)沖洗，與解吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)同(tong)時(shi)(shi)進(jin)(jin)行。右(you)(you)(you)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)后(hou)(hou)，進(jin)(jin)入(ru)均(jun)壓(ya)(ya)(ya)(ya)過(guo)(guo)(guo)(guo)程(cheng)(cheng)(cheng)(cheng)，然后(hou)(hou)切換到左(zuo)(zuo)(zuo)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)過(guo)(guo)(guo)(guo)程(cheng)(cheng)(cheng)(cheng)，繼續循環。制氮(dan)(dan)機的(de)(de)(de)(de)(de)工作流(liu)(liu)程(cheng)(cheng)(cheng)(cheng)由(you)可(ke)編(bian)程(cheng)(cheng)(cheng)(cheng)控(kong)(kong)制器控(kong)(kong)制三(san)(san)個二(er)位五(wu)(wu)(wu)通(tong)(tong)(tong)(tong)(tong)先(xian)(xian)導(dao)(dao)(dao)(dao)電(dian)(dian)(dian)(dian)(dian)磁閥(fa)(fa)(fa)(fa)(fa)(fa)，再由(you)電(dian)(dian)(dian)(dian)(dian)磁閥(fa)(fa)(fa)(fa)(fa)(fa)分別(bie)控(kong)(kong)制八個氣(qi)動(dong)管道閥(fa)(fa)(fa)(fa)(fa)(fa)門(men)的(de)(de)(de)(de)(de)開(kai)(kai)啟和關(guan)(guan)閉來(lai)完(wan)成。三(san)(san)個兩(liang)位五(wu)(wu)(wu)通(tong)(tong)(tong)(tong)(tong)先(xian)(xian)導(dao)(dao)(dao)(dao)電(dian)(dian)(dian)(dian)(dian)磁閥(fa)(fa)(fa)(fa)(fa)(fa)分別(bie)控(kong)(kong)制左(zuo)(zuo)(zuo)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)、均(jun)壓(ya)(ya)(ya)(ya)、右(you)(you)(you)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)的(de)(de)(de)(de)(de)狀態。左(zuo)(zuo)(zuo)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)氣(qi)、壓(ya)(ya)(ya)(ya)力均(jun)衡(heng)和右(you)(you)(you)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)氣(qi)的(de)(de)(de)(de)(de)時(shi)(shi)間流(liu)(liu)量已存儲在(zai)(zai)可(ke)編(bian)程(cheng)(cheng)(cheng)(cheng)控(kong)(kong)制器中(zhong)(zhong)(zhong)。在(zai)(zai)斷電(dian)(dian)(dian)(dian)(dian)狀態下，三(san)(san)個二(er)位五(wu)(wu)(wu)通(tong)(tong)(tong)(tong)(tong)先(xian)(xian)導(dao)(dao)(dao)(dao)電(dian)(dian)(dian)(dian)(dian)磁閥(fa)(fa)(fa)(fa)(fa)(fa)的(de)(de)(de)(de)(de)先(xian)(xian)導(dao)(dao)(dao)(dao)氣(qi)體(ti)(ti)連(lian)接到氣(qi)動(dong)管道閥(fa)(fa)(fa)(fa)(fa)(fa)的(de)(de)(de)(de)(de)關(guan)(guan)閉口(kou)。當過(guo)(guo)(guo)(guo)程(cheng)(cheng)(cheng)(cheng)處于(yu)左(zuo)(zuo)(zuo)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)狀態時(shi)(shi)，控(kong)(kong)制左(zuo)(zuo)(zuo)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)的(de)(de)(de)(de)(de)電(dian)(dian)(dian)(dian)(dian)磁閥(fa)(fa)(fa)(fa)(fa)(fa)通(tong)(tong)(tong)(tong)(tong)電(dian)(dian)(dian)(dian)(dian)，先(xian)(xian)導(dao)(dao)(dao)(dao)氣(qi)體(ti)(ti)連(lian)接到左(zuo)(zuo)(zuo)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)氣(qi)閥(fa)(fa)(fa)(fa)(fa)(fa)、左(zuo)(zuo)(zuo)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)氣(qi)閥(fa)(fa)(fa)(fa)(fa)(fa)和右(you)(you)(you)排(pai)氣(qi)閥(fa)(fa)(fa)(fa)(fa)(fa)的(de)(de)(de)(de)(de)開(kai)(kai)口(kou)處，使(shi)這(zhe)三(san)(san)個閥(fa)(fa)(fa)(fa)(fa)(fa)門(men)打開(kai)(kai)，完(wan)成左(zuo)(zuo)(zuo)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)過(guo)(guo)(guo)(guo)程(cheng)(cheng)(cheng)(cheng)并(bing)在(zai)(zai)右(you)(you)(you)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)(fu)(fu)塔(ta)(ta)中(zhong)(zhong)(zhong)解吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)。當過(guo)(guo)(guo)(guo)程(cheng)(cheng)(cheng)(cheng)處于(yu)均(jun)壓(ya)(ya)(ya)(ya)狀態時(shi)(shi)，控(kong)(kong)制均(jun)壓(ya)(ya)(ya)(ya)的(de)(de)(de)(de)(de)電(dian)(dian)(dian)(dian)(dian)磁閥(fa)(fa)(fa)(fa)(fa)(fa)通(tong)(tong)(tong)(tong)(tong)電(dian)(dian)(dian)(dian)(dian)，其他閥(fa)(fa)(fa)(fa)(fa)(fa)門(men)關(guan)(guan)閉；先(xian)(xian)導(dao)(dao)(dao)(dao)氣(qi)體(ti)(ti)連(lian)接到上(shang)均(jun)壓(ya)(ya)(ya)(ya)閥(fa)(fa)(fa)(fa)(fa)(fa)和下均(jun)壓(ya)(ya)(ya)(ya)閥(fa)(fa)(fa)(fa)(fa)(fa)的(de)(de)(de)(de)(de)開(kai)(kai)口(kou)，從而(er)打開(kai)(kai)兩(liang)個閥(fa)(fa)(fa)(fa)(fa)(fa)并(bing)完(wan)成均(jun)壓(ya)(ya)(ya)(ya)過(guo)(guo)(guo)(guo)程(cheng)(cheng)(cheng)(cheng)。當過(guo)(guo)(guo)(guo)程(cheng)(cheng)(cheng)(cheng)處于(yu)右(you)(you)(you)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)狀態時(shi)(shi)，控(kong)(kong)制右(you)(you)(you)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)的(de)(de)(de)(de)(de)電(dian)(dian)(dian)(dian)(dian)磁閥(fa)(fa)(fa)(fa)(fa)(fa)通(tong)(tong)(tong)(tong)(tong)電(dian)(dian)(dian)(dian)(dian)，先(xian)(xian)導(dao)(dao)(dao)(dao)氣(qi)體(ti)(ti)連(lian)接到右(you)(you)(you)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)閥(fa)(fa)(fa)(fa)(fa)(fa)、右(you)(you)(you)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)生產(chan)閥(fa)(fa)(fa)(fa)(fa)(fa)和左(zuo)(zuo)(zuo)排(pai)氣(qi)閥(fa)(fa)(fa)(fa)(fa)(fa)的(de)(de)(de)(de)(de)開(kai)(kai)口(kou)處，使(shi)這(zhe)三(san)(san)個閥(fa)(fa)(fa)(fa)(fa)(fa)打開(kai)(kai)，完(wan)成右(you)(you)(you)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)過(guo)(guo)(guo)(guo)程(cheng)(cheng)(cheng)(cheng)并(bing)在(zai)(zai)左(zuo)(zuo)(zuo)吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)附(fu)(fu)(fu)(fu)(fu)塔(ta)(ta)中(zhong)(zhong)(zhong)解吸(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)(xi)。在(zai)(zai)每(mei)個過(guo)(guo)(guo)(guo)程(cheng)(cheng)(cheng)(cheng)中(zhong)(zhong)(zhong)，除了應該(gai)打開(kai)(kai)的(de)(de)(de)(de)(de)閥(fa)(fa)(fa)(fa)(fa)(fa)門(men)外，所有閥(fa)(fa)(fa)(fa)(fa)(fa)門(men)都應該(gai)關(guan)(guan)閉。
